✦ LIBER ✦
Remote AP-PECVD of Silicon Dioxide Films from Hexamethyldisiloxane (HMDSO)
✍ Scribed by S. E. Alexandrov; N. McSporran; M. L. Hitchman
- Publisher
- John Wiley and Sons
- Year
- 2005
- Tongue
- English
- Weight
- 441 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0948-1907
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