✦ LIBER ✦
Reliability study of AlTi/TiW on polysilicon contacts for high temperature sensors
✍ Scribed by A. Andrei; C. Malhaire; S. Brida; J. M. Dujardin; D. Barbier; O. Legras
- Publisher
- Springer-Verlag
- Year
- 2005
- Tongue
- English
- Weight
- 322 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0946-7076
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