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Reliability of trench capacitors for VLSI memories : D. A. Baglee, C. Beydler, P. Shih and M. Yashiro. 24 a. Proc. IEEE Reliab. Phys. Symp., 215 (1986)


Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
124 KB
Volume
27
Category
Article
ISSN
0026-2714

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