✦ LIBER ✦
Reliability of nano-meter thick multi-layer dielectric films on poly-crystalline silicon : Y. Ohji, T. Kusaka, I. Yoshida, A. Hiraiwa, K. Lyagi, K. Mukai and O. Kasahara. Annual Proceedings of the Reliability Physics Symposium, San Diego, U.S.A., p. 55 (1987)
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 127 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0026-2714
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