✦ LIBER ✦
Relaxation of process induced surface stress in amorphous silicon carbide thin films using low energy ion bombardment
✍ Scribed by Argyrakis, P.; McNabb, P.; Snell, A. J.; Cheung, R.
- Book ID
- 121447964
- Publisher
- American Institute of Physics
- Year
- 2006
- Tongue
- English
- Weight
- 242 KB
- Volume
- 89
- Category
- Article
- ISSN
- 0003-6951
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