✦ LIBER ✦
Relaxation of ion implant damage in silicon wafers at room temperature measured by thermal waves and double implant sheet resistance
✍ Scribed by John Schuur; Craig Waters; Jim Maneval; Nick Tripsis; Allan Rosencwaig; Michael Taylor; W.Lee Smith; Lawrence Golding; Jon Opsal
- Book ID
- 113278798
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 270 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0168-583X
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