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Relative ion sputtering yield measurements by integration of secondary ion energy distribution using a retarding-dispersive Ion energy analyzer

✍ Scribed by A. R. Krauss; D. M. Gruen

Publisher: Springer
Year: 1977
Tongue: English
Weight: 769 KB
Volume: 14
Category: Article
ISSN: 1432-0630
DOI: 10.1007/bf00882637

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