Relationships between material properties of piezo-electric thin films and device characteristics of film bulk acoustic resonators

✍ Scribed by Jin-Bock Lee; Dong-Hyun Cho; Do-Young Kim; Chang-Kyun Park; Jin-Seok Park

• Book ID: 108289869
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 579 KB
• Volume: 516
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2007.07.145