Relationship between wafer edge design and its ultimate mechanical strength

✍ Scribed by Po-Ying Chen; Ming-Hsing Tsai; Wen-Kuan Yeh; Ming-Haw Jing; Yukon Chang

• Book ID: 104052652
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 905 KB
• Volume: 87
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.12.083