✦ LIBER ✦
Relationship between total arsenic and electrically active arsenic concentrations in silicon produced by the diffusion process
✍ Scribed by Murota, Junichi; Arai, Eisuke; Kobayashi, Kenji; Kudo, Kiyoshi
- Book ID
- 120939833
- Publisher
- American Institute of Physics
- Year
- 1979
- Tongue
- English
- Weight
- 577 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0021-8979
- DOI
- 10.1063/1.325993
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