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Relationship between the photoluminescence and conductivity of undoped ZnO thin films grown with various oxygen pressures

✍ Scribed by Chang-Feng Yu; Che-Wei Sung; Sy-Hann Chen; Shih-Jye Sun


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
442 KB
Volume
256
Category
Article
ISSN
0169-4332

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Titanium oxynitride (TiN x O y ) thin films were deposited by low-pressure metalΒ±organic CVD (LP-MOCVD) on (100) silicon, sapphire, and polycrystalline alumina substrates. Titanium isopropoxide (TIP) and ammonia were used as precursors. The influence of the growth temperature, ranking from 450 C to