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Relation of the polymeric ion species in plasma to the hardness of a-C:H film made by PSII&D

✍ Scribed by Noriaki Ikenaga; Kouhei Miyamoto; Shintaro Hayashi; Yoichi Kishi; Zenjiro Yajima; Noriyuki Sakudo

No coin nor oath required. For personal study only.

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