Relation between microstructure and stress in titanium nitride films grown by plasma immersion ion implantation

✍ Scribed by Lim, S. H. N.; McCulloch, D. G.; Bilek, M. M. M.; McKenzie, D. R.

• Book ID: 111915378
• Publisher: American Institute of Physics
• Year: 2003
• Tongue: English
• Weight: 796 KB
• Volume: 93
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1558995