Refractive index, free carrier concentration, and mobility depth profiles of ion implanted Si: optical investigation using FTIR spectroscopy

✍ Scribed by Katsidis, Charalambos C.

• Book ID: 115398532
• Publisher: Optical Society of America
• Year: 2008
• Tongue: English
• Weight: 966 KB
• Volume: 25
• Category: Article
• ISSN: 0740-3224
• DOI: 10.1364/JOSAB.25.000854