Enhancement of reflectivity of multilaye
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K Soyama; W Ishiyama; K Murakami
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Article
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1999
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Elsevier Science
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English
โ 141 KB
The reflectivity of multilayer mirrors depend on the interface roughness created during deposition of the layers. In order to smoothen the interfaces, we have investigated the influence of argon ion bombardment on the interface roughness of a Ni/Ti multilayer deposited by ion beam sputtering. The de