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Reflectivity enhancement of large m-Qc supermirror by ion polishing

โœ Scribed by Kazuhiko Soyama; Haruhiko Tsunoda; Katsuhiko Murakami


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
251 KB
Volume
529
Category
Article
ISSN
0168-9002

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Enhancement of reflectivity of multilaye
โœ K Soyama; W Ishiyama; K Murakami ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 141 KB

The reflectivity of multilayer mirrors depend on the interface roughness created during deposition of the layers. In order to smoothen the interfaces, we have investigated the influence of argon ion bombardment on the interface roughness of a Ni/Ti multilayer deposited by ion beam sputtering. The de