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Reflectivity degradation of grazing-incident EUV mirrors by EUV exposure and carbon contamination

✍ Scribed by H. Shin; J.R. Sporre; R. Raju; D.N. Ruzic

Book ID: 104052075
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 984 KB
Volume: 86
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2008.10.009

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