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Reflection-diffraction x-ray diffraction depth profiling of reactively sputtered highly oriented TiN on MgO

✍ Scribed by C.S. Helrich; R.C. Buschert; A.J. Kropf; C. Ernberger; T. Smith


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
475 KB
Volume
39-40
Category
Article
ISSN
0257-8972

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