Comparison of AES analyses of transition
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Hermann A. Jehn; Erhard Grallath; I. LeRoux Strydom; Siegfried Hofmann
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Article
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1990
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John Wiley and Sons
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English
β 473 KB
## Abstract In spite of some work on the quantification of Auger spectra of transitionβmetal nitride thin films (hard coatings), a correlation with the true nitrogen content is rather difficult. In order to get a measure of the validity of the generally applied calibration of AES results by means o