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Reflectance of silicon surfaces after high dose rate molecular ion implantation

✍ Scribed by M.O. Lampert; M. Hage-Ali; J.C. Muller; M. Toulemonde; P. Siffert


Publisher
Elsevier Science
Year
1981
Weight
341 KB
Volume
182-183
Category
Article
ISSN
0029-554X

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