✦ LIBER ✦
Refinements on the Diffusion into the Underlying Silicon of Dopants Implanted in a Silicide Layer
✍ Scribed by Sinder, M. ;Pelleg, J.
- Publisher
- John Wiley and Sons
- Year
- 1998
- Tongue
- English
- Weight
- 164 KB
- Volume
- 168
- Category
- Article
- ISSN
- 0031-8965
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