𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Reference materials for large-scale metal deposition surveys

✍ Scribed by Eiliv Steinnes; Åke Rühling; Harri Lippo; Ahti Mäkinen

Book ID
106229255
Publisher
Springer-Verlag
Year
1997
Tongue
English
Weight
153 KB
Volume
2
Category
Article
ISSN
0949-1775

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Copper electroless deposition technology
Copper electroless deposition technology for ultra-large-scale-integration (ULSI) metallization
✍ Yosi Shacham-Diamand; Valery M. Dubin 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 711 KB

In this paper we present the technology of electroless Cu deposition for ultra-large-scale integration. The technology has several components: the solution chemistry, the operation conditions, the seeding, the equipment and the process integration. Sodium-free solution was used and optimized to achi