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Reentrant oscillation in kinetic thin-film deposition

โœ Scribed by Rong-Fu Xiao

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
422 KB
Volume
229
Category
Article
ISSN
0378-4371

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โœฆ Synopsis

We have studied the origin of reentrant growth oscillation in kinetic thin-film deposition on stepped surfaces using a Monte Carlo simulation. The results show that reentrant oscillation occurs as a result of growth modes competition between two-dimension-nucleation growth and step-flow growth due to a variation of surface-diffusion-length with deposition temperature, and that it is a natural phenomenon in non-equilibrium thin-film deposition on a substrate with a permanent step source.

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