✦ LIBER ✦
Reduction of polarization and swing effects in a high numerical aperture exposure system by utilizing resist antireflective coatings
✍ Scribed by H.L. Chen; W.H. Lee; Wonder Fan; S.Y. Chuang; Y.H. Lai; C.C. Lee
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 832 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0167-9317
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