✦ LIBER ✦
Reduction of mechanical stress in micromachined components caused by humidity-induced volume expansion of polymer layers
✍ Scribed by R. Buchhold; A. Nakladal; G. Gerlach; K. Sahre; K.-J. Eichhorn; M. Müller
- Book ID
- 106186336
- Publisher
- Springer-Verlag
- Year
- 1998
- Tongue
- English
- Weight
- 523 KB
- Volume
- 5
- Category
- Article
- ISSN
- 0946-7076
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