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Reduction of mechanical stress in micromachined components caused by humidity-induced volume expansion of polymer layers

✍ Scribed by R. Buchhold; A. Nakladal; G. Gerlach; K. Sahre; K.-J. Eichhorn; M. Müller


Book ID
106186336
Publisher
Springer-Verlag
Year
1998
Tongue
English
Weight
523 KB
Volume
5
Category
Article
ISSN
0946-7076

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