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Reduction of deep levels in MOCVD-regrown AlxGa1−xas interfaces by (NH4)2S passivation and in-situ HCl etching

✍ Scribed by G. Guel; E. A. Armour; S. Z. Sun; S. T. Srinivasan; K. J. Malloy; S. D. Hersee


Book ID
112819941
Publisher
Springer US
Year
1992
Tongue
English
Weight
498 KB
Volume
21
Category
Article
ISSN
0361-5235

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