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Reduction of carbon contamination in triethylphosphorus OMVPE GaP layers by Pt/Al2O3 catalyst

✍ Scribed by Xue-Lun Wang; Akihiro Wakahara; Hiroshi Kuwahara; Susumu Noda; Akio Sasaki

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 334 KB
Volume: 115
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(91)90749-u

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