✦ LIBER ✦
Reduction of boride-enhanced diffusion by point defect engineering and its application for shallow junction formation
✍ Scribed by Lin Shao; Jiarui Liu; Xuemei Wang; Hui Chen; Phillip E. Thompson; Wei-Kan Chu
- Book ID
- 114167109
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 128 KB
- Volume
- 206
- Category
- Article
- ISSN
- 0168-583X
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