Reduction in thickness error of optical coatings by dividing thick layers and monitoring with multiple witness glasses

✍ Scribed by Zhu, Meiping; Yi, Kui; Du, Ying; Qi, Hongji; Zhang, Weili; Shao, Jianda

• Book ID: 121922637
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 1018 KB
• Volume: 97
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/j.vacuum.2013.04.002