✦ LIBER ✦
Reduced lateral straggling of implantation induced defects in III/V heterostructures by ion implantation along channeling directions
✍ Scribed by Kieslich, A.; Doleschel, H.; Kieseling, F.; Reithmaier, J. P.; Forchel, A.
- Book ID
- 117998582
- Publisher
- American Institute of Physics
- Year
- 1996
- Tongue
- English
- Weight
- 326 KB
- Volume
- 68
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.116769
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