✦ LIBER ✦
Reduced carbon contaminant, low-temperature silicon substrate preparation for “defect-free” homoepitaxy
✍ Scribed by Taylor, Patrick J.; Jesser, W. A.; Martinka, M.; Singley, K. M.; Dinan, J. H.; Lareau, R. T.; Wood, M. C.; Clark, W. W.
- Book ID
- 126928125
- Publisher
- AVS (American Vacuum Society)
- Year
- 1999
- Tongue
- English
- Weight
- 486 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0734-2101
- DOI
- 10.1116/1.581789
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