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Redistribution of deep selenium and sulfur impurities in silicon upon surface doping with phosphorus

✍ Scribed by Yu. A. Astrov; V. A. Kozlov; A. N. Lodygin; L. M. Portsel; V. B. Shuman; E. L. Gurevich; R. Hergenröder


Book ID
111444342
Publisher
Springer
Year
2009
Tongue
English
Weight
222 KB
Volume
43
Category
Article
ISSN
1063-7826

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