Redistribution of deep selenium and sulfur impurities in silicon upon surface doping with phosphorus

✍ Scribed by Yu. A. Astrov; V. A. Kozlov; A. N. Lodygin; L. M. Portsel; V. B. Shuman; E. L. Gurevich; R. Hergenröder

• Book ID: 111444342
• Publisher: Springer
• Year: 2009
• Tongue: English
• Weight: 222 KB
• Volume: 43
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/s1063782609060049