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Redistribution of boron in silicon by high-temperature irradiation with heavy ions

✍ Scribed by Kachurin, G. A. ;Tyshcrenko, I. E. ;Wieser, E. ;Weise, Ch.

Publisher: John Wiley and Sons
Year: 1988
Tongue: English
Weight: 487 KB
Volume: 109
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2211090114

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