✦ LIBER ✦
Redistributed of Fe, Cr and Mo in buried oxide silicon-on-insulator structures during high-temperature furnace annealing
✍ Scribed by Puga, M M S; Hummel, R E; Burk, D E
- Book ID
- 120414359
- Publisher
- Institute of Physics
- Year
- 1992
- Tongue
- English
- Weight
- 802 KB
- Volume
- 7
- Category
- Article
- ISSN
- 0268-1242
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