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Record low surface recombination velocities on 1 Ω cm p‐silicon using remote plasma silicon nitride passivation

✍ Scribed by Lauinger, Thomas; Schmidt, Jan; Aberle, Armin G.; Hezel, Rudolf


Book ID
111677261
Publisher
American Institute of Physics
Year
1996
Tongue
English
Weight
318 KB
Volume
68
Category
Article
ISSN
0003-6951

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