Recoil profiles produced by ion implantation through dielectric layers : R. T. Blunt, R. Sweda and I. R. Sanders. Vacuum34 (1–2), 281 (1984)

• Book ID: 103276171
• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 133 KB
• Volume: 24
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(84)90190-2