✦ LIBER ✦
Recognition of D defects in silicon single crystals by preferential etching and effect on gate oxide integrity
✍ Scribed by Yamagishi, H; Fusegawa, I; Fujimaki, N; Katayama, M
- Book ID
- 126536021
- Publisher
- Institute of Physics
- Year
- 1992
- Tongue
- English
- Weight
- 746 KB
- Volume
- 7
- Category
- Article
- ISSN
- 0268-1242
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