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Recirculating-Planar-Magnetron Simulations and Experiment

✍ Scribed by Franzi, Matthew A.; Gilgenbach, Ronald M.; Hoff, Brad W.; Chalenski, David A.; Simon, David; Lau, Y. Y.; Luginsland, John

Book ID
120211163
Publisher
IEEE
Year
2013
Tongue
English
Weight
850 KB
Volume
41
Category
Article
ISSN
0093-3813

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## Abstract The operation of reactors with flow reversal operate similar to a reactor with internal recirculation, which the feed enters through one (say, inner) reactor and then turns around and flows out through (the outer) another, when the heat‐transfer coefficient between the tubes is large. I