Recent progress in refractory-metal silicide formation by ion beam mixing and its applications to VLSL

✍ Scribed by Hidekazu Okabayashi

• Book ID: 113280174
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 986 KB
• Volume: 39
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(89)90781-7