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Recent Progress in FSMA Microactuator Developments

✍ Scribed by Kohl, Manfred; Reddy Y., Srinivasa; Khelfaoui, Fadila; Krevet, Berthold; Backen, A.; Fähler, S.; Eichhorn, Tobias; Jakob, Gerhard; Mecklenburg, A.

Book ID: 121508863
Publisher: Trans Tech Publications, Ltd.
Year: 2009
Tongue: English
Weight: 513 KB
Volume: 635
Category: Article
ISSN: 1662-9752
DOI: 10.4028/www.scientific.net/MSF.635.145

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