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Recent developments in the MOCVD and ALD of rare earth oxides and silicates

✍ Scribed by Anthony C. Jones; Helen C. Aspinall; Paul R. Chalker; Richard J. Potter; Kaupo Kukli; Antti Rahtu; Mikko Ritala; Markku Leskelä


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
298 KB
Volume
118
Category
Article
ISSN
0921-5107

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