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Recent developments in metalorganic precursors for metalorganic chemical vapour deposition

✍ Scribed by A.C. Jones; S.A. Rushworth; J. Auld

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 541 KB
Volume: 146
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(94)00469-2

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