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Recent developments and research challenges in electrochemical micromachining (µECM)

✍ Scribed by Spieser, Alexandre; Ivanov, Atanas

Book ID: 120613423
Publisher: Springer
Year: 2013
Tongue: English
Weight: 943 KB
Volume: 69
Category: Article
ISSN: 0268-3768
DOI: 10.1007/s00170-013-5024-8

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## Abstract The characteristics and abilities of excimer lasers for micromachining of fused silica and crystal quartz are reviewed and their applications for making high‐precision and high‐quality microstructures are studied. In addition to the direct ablation technique, two special techniques: las