Recent advances in MEMS sensor technology—thermo-fluid and electro-magnetic devices

✍ Scribed by Khoshnoud, F.; de Silva, C.W.

• Book ID: 117896289
• Publisher: IEEE
• Year: 2012
• Tongue: English
• Weight: 815 KB
• Volume: 15
• Category: Article
• ISSN: 1094-6969
• DOI: 10.1109/mim.2012.6204868