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Recent Achievements and Future Challenges in SiC Homoepitaxial Growth

✍ Scribed by Kimoto, Tsunenobu; Nakazawa, S.; Fujihira, Keiko; Hirao, T.; Nakamura, Shun-ichi; Chen, Yi; Hashimoto, K.; Matsunami, Hiroyuki


Book ID
121012964
Publisher
Trans Tech Publications, Ltd.
Year
2002
Tongue
English
Weight
557 KB
Volume
389-393
Category
Article
ISSN
1662-9752

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