Realization of ultra dense arrays of vertical silicon nanowires with defect free surface and perfect anisotropy using a top-down approach

✍ Scribed by Xiang-Lei Han; Guilhem Larrieu; Pier-Francesco Fazzini; Emmanuel Dubois

• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 469 KB
• Volume: 88
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2010.12.102