✦ LIBER ✦
Real time thickness measurement of thin film for end-point detector (EPD) of 12-inch spin etcher using the white light interferometry
✍ Scribed by Nohyu Kim
- Book ID
- 106184876
- Publisher
- Springer-Verlag
- Year
- 2005
- Tongue
- English
- Weight
- 442 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0946-7076
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