✦ LIBER ✦
Real-time temperature measurement during a laser annealing process featuring a microthermocouple array: Exploiting nano and micro-metrology
✍ Scribed by A. Chiolerio; P. Pandolfi; G. Maccioni; A. Sacco; D. Perrone; G. Grange
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 721 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
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