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Real-time stress evolution during early growth stages of sputter-deposited metal films: Influence of adatom mobility

✍ Scribed by Abadias, G.; Fillon, A.; Colin, J.J.; Michel, A.; Jaouen, C.


Book ID
121349140
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
800 KB
Volume
100
Category
Article
ISSN
0042-207X

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