Real time sputter deposition monitoring using glow discharge mass spectroscopy: B.F.T. Bolker Solid St. Technol. 115 (December 1983)

• Book ID: 104157561
• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 71 KB
• Volume: 18
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(87)80413-5