Real-time scanning microprobe reflection high-energy electron diffraction observations of the cleaning process of GaAs substrates

✍ Scribed by Y. Morishita; S. Goto; Y. Nomura; T. Isu; Y. Katayama

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 635 KB
• Volume: 150
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(95)80191-e